Title:
工程／装備の計測データの微細変動検知方法及びシステム
Document Type and Number:
Japanese Patent JP6757846
Kind Code:
B2
Abstract:
A method and a system for sensing fine changes in processing/equipment measurement data are provided. A data change sensing method according to an embodiment of the present invention extracts a part on the basis of a statistical distribution of reference data and comparison data, calculates a target range on the basis of a specification, and discriminates data, included in the target range, among the extracted reference data and comparison data so as to determine data changes. Therefore, fine changes in measurement data for processing or equipment can be sensed in a manufacturing process, thereby enabling pre-estimation of potential quality variability of products and quick preemptive actions for preventing quality degradation.
Inventors:
Ibunmin
Hong Taeyeon
Song Mun Soon
Hong Taeyeon
Song Mun Soon
Application Number:
JP2019505448A
Publication Date:
September 23, 2020
Filing Date:
August 07, 2017
Export Citation:
Assignee:
SK Holdings Limited
International Classes:
G05B19/418; G06Q50/04
Domestic Patent References:
| JP2000029513A | ||||
| JP2016071454A |
Foreign References:
| KR1020140113153A |
Attorney, Agent or Firm:
Shinji Aida
Zheng Yuanji
Kyoko Aida
Zheng Yuanji
Kyoko Aida