Title:
成膜装置
Document Type and Number:
Japanese Patent JP6758762
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a film deposition apparatus that is configured to lead a lead wire coated with an insulating film out through a seal structure part, and that can lighten the load of maintenance work and is improved in durability.SOLUTION: The present invention relates to a film deposition apparatus that comprises a vacuum chamber 3, a coil 17 and a cooling medium storage part, a seal structure part 23 provided on an outer wall of the cooling medium storage part comprising a press cap 43 for pressing a seal material 27 having a lead wire seal part 27a only outside the cooling medium storage part. The seal structure part thus comprises the press cap 43 only outside the cooling medium storage part, and then sealing can be performed in assembly with a lead wire 19 led out to a proper length, so the lifetime of the lead wire 19 never becomes shorter than as assumed and the durability of the film deposition apparatus 1 can be improved.SELECTED DRAWING: Figure 2
Inventors:
Seiji Maehara
Kazuki Iio
Kazuki Iio
Application Number:
JP2016216006A
Publication Date:
September 23, 2020
Filing Date:
November 04, 2016
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
C23C14/32; H05H1/26; H05H1/48
Domestic Patent References:
| JP2010209403A | ||||
| JP10298741A | ||||
| JP3001626U | ||||
| JP54155198U |
Attorney, Agent or Firm:
Yamauchi Patent Office