基板生産管理装置および基板生産管理方法

Title:

基板生産管理装置および基板生産管理方法

Document Type and Number:

Japanese Patent JP6761297

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a substrate production management device which prompts appropriate adaptation work by displaying a reference time suitable for grasping seriousness of a factor event or estimating a production stop time.SOLUTION: The present invention relates to a substrate production management device 1 configured to manage a substrate production line 2. The substrate production management device comprises: a result time collection part 51 for collecting, when a factor event requiring adaptation work occurs on the substrate production line 2, a result time TR that is at least one of a stop time TRs and a work time TRw, correspondingly to the kind of the factor event; a normal time calculation part 52 for calculating a normal time TN that is at least one of a normal stop time TNs and a normal work time TNw, for each of kinds of the factor events by statistically processing multiple result time TR in the same kind of factor event that occurred multiple times in the past; and a normal time display part 53 by which, when a factor event requiring adaptation work newly occurs, a normal time TN calculated for the same kind of factor event is displayed.SELECTED DRAWING: Figure 3

Inventors:

Koji Shimizu

Application Number:

JP2016147017A

Publication Date:

September 23, 2020

Filing Date:

July 27, 2016

Export Citation:

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