Title:
基板移載装置
Document Type and Number:
Japanese Patent JP6774276
Kind Code:
B2
Abstract:
A substrate transfer hand coupled to a robot arm includes a base part coupled to the robot arm; and a substrate holding part coupled to the base part to hold a substrate. When viewed in a substrate perpendicular line direction perpendicular to the substrate held by the substrate holding part, the substrate transfer hand is bent at a coupling portion at which the base part and the substrate holding part are coupled to each other or a region which is in the vicinity of the coupling portion, and the base part and the substrate transfer hand have a V-shape, as a whole.
Inventors:
Yasuhiko Hashimoto
Tetsuya Yoshida
Tetsuya Yoshida
Application Number:
JP2016178945A
Publication Date:
October 21, 2020
Filing Date:
September 13, 2016
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
H01L21/677; B65G49/07
Domestic Patent References:
| JP2016505219A | ||||
| JP2002518838A | ||||
| JP63129641A | ||||
| JP2003229467A |
Attorney, Agent or Firm:
Patent business corporation Yuko patent office