Title:
導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体
Document Type and Number:
Japanese Patent JP6778644
Kind Code:
B2
Abstract:
To provide a method for producing a conductive silicon carbide-based sintered body, in which: variation of resistivity associated with oxidization is suppressed; and a ratio of a β-type silicon carbide is made larger to reduce temperature dependency of the resistivity.SOLUTION: A sintered body is formed of a starting material comprising a raw material of a conductive phase, the silicon carbide-based conductive phase, wherein the raw material comprises nitride as a dopant. The sintered body is produced, in which variation of resistivity associated with oxidization is smaller than a sintered body having no high-resistance phase by forming the high-resistance phase on at least an external surface of the sintered body, the high-resistance phase being the silicon carbide-based conductive phase in which nitride density is lower than an average nitride density of the conductive phase. By making the starting material comprise the β-type aggregate, the coarse particles that comprise a β-type conductive silicon carbide and have a particle diameter of 5-50 μm, a ratio of a β-type silicon carbide in the whole sintered body is changed to vary temperature dependency of the resistivity; and the ratio of the β-type silicon carbide in the high-resistance phase is made larger than a sintered body formed of a starting material that does not comprise a β-type aggregate.SELECTED DRAWING: Figure 1
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Inventors:
Tomoyuki Yamada
Shin Kiyoki
Shin Kiyoki
Application Number:
JP2017065242A
Publication Date:
November 04, 2020
Filing Date:
March 29, 2017
Export Citation:
Assignee:
Tokyo Ceramic Co., Ltd.
International Classes:
C04B35/569
Domestic Patent References:
| JP2003073168A | ||||
| JP2016183081A | ||||
| JP9255428A |
Foreign References:
| US7342201 |
Attorney, Agent or Firm:
Oya Masayo
Kanji Maeda
Kanji Maeda