Title:
真空洗浄装置および真空洗浄方法
Document Type and Number:
Japanese Patent JP6783209
Kind Code:
B2
Abstract:
Vacuum cleaning apparatus (1, 51) includes a vapor generating member (8, 8a, 53, 53a) for generating vapor of a petroleum-based solvent, a cleaning chamber (2) allowing a workpiece to be cleaned under reduced pressure by the vapor fed from the vapor generating member, a condensing chamber (21) that is connected to the cleaning chamber and is maintained in a depressurized state, a temperature maintaining member (22) that maintains the condensing chamber at a lower temperature than the cleaning chamber, and an opening/closing member (20) that provides or cuts off communication between the condensing chamber and the cleaning chamber.
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Inventors:
Hiramoto
Masatoshi Mitsuka
Hiroyuki Konishi
Masatoshi Mitsuka
Hiroyuki Konishi
Application Number:
JP2017187515A
Publication Date:
November 11, 2020
Filing Date:
September 28, 2017
Export Citation:
Assignee:
Ihi Co., Ltd.
Ihi Mechanical Systems Co., Ltd.
Ihi Mechanical Systems Co., Ltd.
International Classes:
B08B3/08; B08B3/04
Domestic Patent References:
| JP2000160378A | ||||
| JP200051802A |
Attorney, Agent or Firm:
Nishizawa Kazumi
Mitsuo Teramoto
Yuichiro Shimizu
Hisanori Takahashi
Mitsuo Teramoto
Yuichiro Shimizu
Hisanori Takahashi