Title:
真空排気システム
Document Type and Number:
Japanese Patent JP6786668
Kind Code:
B2
Abstract:
To provide an evacuation system that can switch evacuation operation from a vacuum pump to a backup pump before the rotational speed of the vacuum pump greatly decreases.SOLUTION: An evacuation system comprises a pressure sensor 21 connected to a suction pipe 5, an opening/closing valve 15 and a backup valve 16 connected to a branch pipe 6 and a backup pipe 8 respectively, a vacuum pump 10 connected to the branch pipe 6, a backup pump 12 connected to the backup pipe 8, and an operation control unit 20 for controlling opening/closing operation of the opening/closing valve 15 and the backup valve 16. When a measured value of suction side pressure measured by the pressure sensor 21 reaches a threshold value, the operation control unit 20 opens the backup valve 16 and closes the opening/closing valve 15. The threshold value is lower than a pressure upper limit value indicating an abnormal rise of pressure in a processing chamber 1.SELECTED DRAWING: Figure 6
Inventors:
Toru Osuka
Application Number:
JP2019116180A
Publication Date:
November 18, 2020
Filing Date:
June 24, 2019
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B37/16; F04B41/06; F04B49/10
Domestic Patent References:
| JP10063301A | ||||
| JP3279694A | ||||
| JP2012033522A |
Foreign References:
| WO2012086767A1 |
Attorney, Agent or Firm:
Tetsuya Hirosawa
Isamu Watanabe
Isamu Watanabe