Title:
半導体製造装置の動作に関する表示を制御する方法を実行するプログラム、当該方法及び半導体製造装置の動作に関する表示を行うシステム
Document Type and Number:
Japanese Patent JP6789871
Kind Code:
B2
Abstract:
A method is provided, the method including: repeatedly acquiring a state of one or more devices included in the semiconductor manufacturing apparatus; providing a first animation indicating an operation of the semiconductor manufacturing apparatus by displaying at least an image indicating the state of one or more devices on a display unit each time the state is acquired; storing, in a memory, the acquired state of one or more devices and a time related to the state; receiving an input for switching a display mode; and providing a second animation of the semiconductor manufacturing apparatus by displaying, one by one on the display unit, at least one or more images respectively indicating the state of one or more devices related to one or more times including a reference time stored in the memory, after receiving the input for switching a display mode.
Inventors:
Masayuki Fujiki
Eiji Aoyama
Tatsuya Koizumi
Eiji Aoyama
Tatsuya Koizumi
Application Number:
JP2017070972A
Publication Date:
November 25, 2020
Filing Date:
March 31, 2017
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01L21/02; G05B23/02; H01L21/304
Domestic Patent References:
| JP2013051282A | ||||
| JP2010224893A | ||||
| JP2002132336A | ||||
| JP2013092858A |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Makoto Watanabe