Title:
基板を脱ガスするためのチャンバ
Document Type and Number:
Japanese Patent JP6800237
Kind Code:
B2
Abstract:
A heater and/or cooler chamber includes a heat storage block or chunk. In the block a multitude of parallel, stacked slit pockets each dimensioned to accommodate a single plate shaped workpiece. Workpiece handling openings of the slit pockets are freed and respectively covered by a door arrangement. The slit pockets are tailored to snuggly surround the plate shaped workpieces therein so as to establish an efficient heat transfer between the heat storage block or chunk and the workpieces to be cooled or heated.
Inventors:
Logier Rodder
Martin Schaefer
Jürgen Weichart
Martin Schaefer
Jürgen Weichart
Application Number:
JP2018547428A
Publication Date:
December 16, 2020
Filing Date:
March 08, 2016
Export Citation:
Assignee:
Evatech AG
International Classes:
H01L21/02; C23C14/02; C23C14/56; H01L21/203; H01L21/677; H01L21/683
Domestic Patent References:
| JP2016018994A | ||||
| JP2015056669A | ||||
| JP10107126A | ||||
| JP2001516500A | ||||
| JP2000504876A |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe
Shinya Mitsuhiro
Tatsuhiko Abe