Title:
チャックテーブル機構
Document Type and Number:
Japanese Patent JP6800689
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a chuck table mechanism which prevents the processing quality from being deteriorated by intrusion of contaminants into a space between a chuck table and a chuck table base.SOLUTION: A chuck table mechanism (30) includes: a chuck table base (36) mounted on a rotation driving part (37); and a chuck table (35) which is mounted on the chuck table base and suctions and holds a wafer (W). The chuck table mechanism (30) further includes an elastic member (38) which is disposed covering an interface between a chuck table outer periphery side surface (45) and a chuck table base outer periphery side surface (51) and enclosing the outer periphery side surfaces to prevent intrusion of contaminants into the interface in a state where a chuck table rear surface (43) is placed in contact with a chuck table base upper surface (50) and fixed thereto by screws (52) or suctioning. The elastic member prevents intrusion of contaminants and prevents deterioration of accuracy of an upper surface of the chuck table which suctions and holds the wafer.SELECTED DRAWING: Figure 3
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Inventors:
Koichi Ohino
Tomohiro Shirahama
Ichiro Yamabata
Tomohiro Shirahama
Ichiro Yamabata
Application Number:
JP2016198613A
Publication Date:
December 16, 2020
Filing Date:
October 07, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683; B23Q11/00; B24B41/06; B24B55/08; H01L21/304
Domestic Patent References:
| JP2007042960A | ||||
| JP2011173181A | ||||
| JP2005279788A | ||||
| JP2016152414A | ||||
| JP2005046969A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki