Title:
波閉じ込め構造を有する板波デバイス及び作製方法
Document Type and Number:
Japanese Patent JP6800882
Kind Code:
B2
Abstract:
A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure.
Inventors:
Batacharzy Khsar
Application Number:
JP2017551574A
Publication Date:
December 16, 2020
Filing Date:
December 17, 2015
Export Citation:
Assignee:
Corvo Us Incorporated
International Classes:
H03H9/25; H03H3/08; H03H9/145
Domestic Patent References:
| JP2004187204A | ||||
| JP56064509A |
Foreign References:
| WO2010004741A1 | ||||
| WO2012086441A1 |
Attorney, Agent or Firm:
Nagoya International Patent Service Corporation