Title:
ポリカルボシランを含んでなるシリコンカーバイド質膜形成組成物、およびそれを用いたシリコンカーバイド質膜の製造方法
Document Type and Number:
Japanese Patent JP6804691
Kind Code:
B2
Abstract:
[Problem] To provide a composition comprising polycarbosilane, which has excellent filling property, can form a film at a lower temperature, and makes electrical property of the produced film excellent. [Means for Solution] A silicon carbonaceous film forming composition comprising polycarbosilane and a solvent, wherein the ratio of the integrated intensity at 3.92 to 4.20 ppm to the integrated intensity at 3.60 to 5.50 ppm in the H-NMR spectrum of said polycarbosilane is 27 to 50%.
Inventors:
Sataya Okamura
Application Number:
JP2020504206A
Publication Date:
December 23, 2020
Filing Date:
August 07, 2018
Export Citation:
Assignee:
Merck Patent GmbH
International Classes:
C01B32/977; C08L83/16; C08G77/60; C09D183/16; H01L21/312
Domestic Patent References:
| JP51126300A | ||||
| JP2018037641A | ||||
| JP2011079917A | ||||
| JP58063724A |
Attorney, Agent or Firm:
Yukitaka Nakamura
Satoru Asakura
Hideaki Maekawa
Endo Ayako
Satoru Asakura
Hideaki Maekawa
Endo Ayako