Title:
インラインディスペンスキャパシタシステム
Document Type and Number:
Japanese Patent JP6805433
Kind Code:
B2
Abstract:
A fluid dispensing apparatus and method is disclosed. Systems include an in-line or linear bladder apparatus array configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. The bladder array is disposed within a chamber of pressure control fluid common to exterior surfaces of each bladder in the bladder array. Simultaneously, some bladders within the array of linear bladders can be dispensing fluid or maintaining fluid while some bladders are collecting fluid. A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation. With multiple bladders, multiple different types of fluid can be readied for selective dispense.
Inventors:
Devilliers, Anton Jay.
Ronald Nasman
Glute jet, james
Jacobson, Jr., Norman A..
Ronald Nasman
Glute jet, james
Jacobson, Jr., Norman A..
Application Number:
JP2017567169A
Publication Date:
December 23, 2020
Filing Date:
June 22, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; B05C5/00; B05C11/10; G03F7/16
Domestic Patent References:
| JP2005504908A | ||||
| JP2011021611A |
Foreign References:
| US20030062382 | ||||
| US20120292344 | ||||
| KR101408766B1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki