Title:
分割方法
Document Type and Number:
Japanese Patent JP6808295
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a division method of workpiece capable of keeping low the possibility of adhesion of scrap generated at the time of division to the workpiece.SOLUTION: A division method of a workpiece where origin regions becoming the origins of division are formed along a dividing planned line and an expand sheet is stuck, includes a fixing step of fixing the expand sheet on the outside of the workpiece, and a division step of dividing the workpiece along the origin regions by giving an external force to the workpiece by expanding the expand sheet while placing the workpiece below the expand sheet after executing the fixing step. In the division step, the expand sheet is expanded while jetting liquid toward the workpiece from below.SELECTED DRAWING: Figure 5
Inventors:
Zhao Kim
Yoshiaki Yodo
Yoshiaki Yodo
Application Number:
JP2017092457A
Publication Date:
January 06, 2021
Filing Date:
May 08, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B26F3/02; B28D5/00
Domestic Patent References:
| JP2013041967A | ||||
| JP2001319908A | ||||
| JP2015082601A | ||||
| JP4159750A | ||||
| JP6177245A | ||||
| JP2013105823A | ||||
| JP2017054843A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro