Title:
物体搬送装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法
Document Type and Number:
Japanese Patent JP6810911
Kind Code:
B2
Abstract:
To provide a mask stage device improved in position control properties of a mask.SOLUTION: The mask stage device 14 includes: a first micromotion stage 48 disposed on a guide 44 extending in a scanning direction (X axis direction ), supporting a +Y side end part of a mask M, and movable on the guide 44 along the scanning direction; and a second micromotion stage 48 disposed on a guide 44 other than the guide 44 extending in the scanning direction so as to physically separate from the micromotion stage 48 supporting the +Y side end part of the mask M, supporting a -Y side end part of the mask M, and movable on the other guide 44 along the scanning direction.SELECTED DRAWING: Figure 2
Inventors:
Yasuo Aoki
Kunihiro Kawae
Sumio Hatta
Kazuo Naito
Kunihiro Kawae
Sumio Hatta
Kazuo Naito
Application Number:
JP2019084905A
Publication Date:
January 13, 2021
Filing Date:
April 26, 2019
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/677
Domestic Patent References:
| JP2003068620A | ||||
| JP2009016388A | ||||
| JP2012058391A |
Foreign References:
| WO2010131485A1 | ||||
| US20040223132 |
Attorney, Agent or Firm:
Atsushi Tateishi