Title:
振動子を有する微小機械部品、微小機械部品の製造方法、および回転軸線を中心とした変位可能な部品の運動を誘起する方法
Document Type and Number:
Japanese Patent JP6812575
Kind Code:
B2
Abstract:
A micromechanical component having a mount, an adjustable element, which is connected via at least one spring to the mount, and an actuator device, a first oscillatory motion of the adjustable element about a first axis of rotation and simultaneously a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, being excitable about a second axis of rotation in response to the actuator device; and the adjustable element being configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is adjustable by a resulting angular momentum about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to second axis of rotation. Also, a method for manufacturing a micromechanical component. Moreover, a method for exciting a motion of an adjustable element about a rotational axis.
Inventors:
Kaupman, Philip
Pinter, stephan
Gurchek, Helmut
Franz, Jochen
Mukh, Jörg
Pinter, stephan
Gurchek, Helmut
Franz, Jochen
Mukh, Jörg
Application Number:
JP2019557674A
Publication Date:
January 13, 2021
Filing Date:
November 16, 2017
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
B81B3/00; B81C3/00
Domestic Patent References:
| JP2010008611A | ||||
| JP2012528343A | ||||
| JP2016219603A | ||||
| JP2015227899A | ||||
| JP2013178418A |
Foreign References:
| US20050156481 | ||||
| WO2015152309A1 |
Attorney, Agent or Firm:
Osamu Yamamoto
Shinjiro Ono
Motoharu Nakanishi
Junichi Matsuo
Shinjiro Ono
Motoharu Nakanishi
Junichi Matsuo
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