Title:
質量分離器
Document Type and Number:
Japanese Patent JP6813048
Kind Code:
B2
Abstract:
Provided is a mass separator (100) for performing mass separation for an ion beam (IB). The mass separator (100) includes a transfer structure (30) that is a component of a yoke (13) and move at least one of an upper yoke (13a) positioned over the beam path (L), a lower yoke (13b) positioned under the beam path (L), and a side yoke (13c, 13d) positioned at a side of the beam path (L) between a normal position (P) in the traveling of the ion beam (IB) and a retracted position (Q) that does not overlap with at least a part of the normal position (P); the yoke (13) is surrounding the beam path (L) and is made of a magnetic body.
Inventors:
Daiki Takashima
Ippei Nishimura
Ippei Nishimura
Application Number:
JP2019059842A
Publication Date:
January 13, 2021
Filing Date:
March 27, 2019
Export Citation:
Assignee:
Nissin Ion Equipment Co., Ltd.
International Classes:
H01J49/30; H01J37/317; H01L21/265
Domestic Patent References:
| JP59134544A | ||||
| JP6260133A | ||||
| JP2014225355A |
Foreign References:
| KR20030030174A |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Uemura Yoshinaga
Saito Shindai
Uemura Yoshinaga