Title:
被加工物の切削方法
Document Type and Number:
Japanese Patent JP6814663
Kind Code:
B2
Abstract:
To prevent incomplete cutting of a workpiece by a cutting blade and to prevent an excessive processing time from increasing due to the cutting blade processing a region where no workpiece is present. The present invention is a method of cutting a workpiece along a predetermined cutting line with a cutting mechanism having a spindle and a blade, and the method comprises the following steps: a step to hold the workpiece by a chuck table; a step of cutting the workpiece by moving the chuck table and the blade relatively toward the cutting-feeding direction at a specified speed, while rotating and positioning the blade at the cutting position relative to the workpiece held on the chuck table; a step to detect the load current value of the motor rotating the driving spindle in the processing step; and determining that the blade has cut through the workpiece in the cutting-feeding direction when the load current value detected in the current value detecting step is less than the threshold value.
Inventors:
Three pillars
Application Number:
JP2017038159A
Publication Date:
January 20, 2021
Filing Date:
March 01, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B49/16
Domestic Patent References:
| JP2009283604A | ||||
| JP2003516624A | ||||
| JP5069320A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office