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Title:
磁性異物検査装置および磁性異物検査システム
Document Type and Number:
Japanese Patent JP6842164
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a foreign substance inspection device which does not need a magnetic shield when inspecting a magnetic foreign substance, is applicable to a large device in which the distance between the sensor and an inspection object is relatively large, and can make a highly precise detection even when a large amount of inspection target object is processed or when a detection target is a magnetic foreign substance mixed in the inside of the inspection target object.SOLUTION: The foreign substance inspection device includes: magnetic field generating means; a plate-like soft magnetic member; and a magnetic sensor having a directivity in the direction in which the magnetic field is detected. The magnetic field generating means applies a magnetic field to an inspection region containing an inspection target object. The soft magnetic member is arranged so that one main surface is in contact with the magnetic field generating means. The magnetic sensor is arranged near another main surface of the soft magnetic member and is arranged so that the directivity exists in the tangential direction of another main surface.SELECTED DRAWING: Figure 1

Inventors:
Masahiro Nakai
Application Number:
JP2017040118A
Publication Date:
March 17, 2021
Filing Date:
March 03, 2017
Export Citation:
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Assignee:
Miyagi Prefecture
International Classes:
G01N27/83; G01R33/02
Domestic Patent References:
JP2014159984A
JP2004340953A
JP2016180701A
JP2015524065A
JP10088469A
JP3181879A
JP2000321366A
JP2003021669A
Foreign References:
US20160282500
Other References:
中居 倫夫,高周波キャリア型薄膜磁気センサを用いた微粒子異物の検出,電気学会フィジカルセンサ研究会資料,日本,一般社団法人 電気学会,2016年 6月30日,PHS-16, 13-17,11-20
中居 倫夫 他,高周波キャリア型磁界センサにおける傾斜磁区制御方法とインピーダンス特性,日本応用磁気学会誌,日本,日本応用磁気学会,2003年 3月26日,Vol.27, No.7,832-838
Attorney, Agent or Firm:
Kenho Ikeda
Takashi Sasaki