Title:
供給装置、インプリント装置、および物品の製造方法
Document Type and Number:
Japanese Patent JP6851148
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a technique advantageous for determining execution of maintenance processing of a discharge surface.SOLUTION: A supply device for supplying liquid onto an object includes a discharge section having a discharge surface in which a discharge opening is formed, and discharging liquid from the discharge opening to the object, a measurement section for measuring the height of the discharge surface, and a processing section for determining execution of maintenance processing of the discharge section according to difference of a measured value obtained in the measurement section and a reference value, for two remaining places excepting one place satisfying removal conditions related to the measured value, out of the places of the discharge surface where there is a difference between measured value obtained in the measurement section and a reference value.SELECTED DRAWING: Figure 1
Inventors:
Takahiro Toyoshima
Application Number:
JP2016116366A
Publication Date:
March 31, 2021
Filing Date:
June 10, 2016
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B05C5/00; B05C11/00; B29C59/02
Domestic Patent References:
| JP2011192917A | ||||
| JP2008254200A | ||||
| JP2015034813A | ||||
| JP2115066A |
Foreign References:
| US20160161868 |
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office