Title:
産業用ロボット
Document Type and Number:
Japanese Patent JP6862233
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an industrial robot capable of easily adjusting positions in vertical directions of each of a plurality of loading parts in spite of capability to vary gaps in vertical directions of a plurality of loading parts so arranged that substrates can be mounted and stacked in vertical directions.SOLUTION: In this industrial robot, a substrate loading mechanism comprises: a plurality of hands 18-21, which has loading parts 12-15 so arranged that substrates can be loaded and stacked in vertical directions; and a pitch change mechanism 30, which changes gaps in vertical directions of the plurality of loading parts 12-15. The pitch change mechanism 30 comprises a hand coupling part 42 serving as the coupling part of the hands 18-21 with a lever member 41, where the hand coupling part 42 comprises a roller 44 rotatably attached on the lever member 41 and a guide member 45 attached on the hands 18-21 to guide the roller 44 in a lateral direction. The guide member 45 is attached so as to be capable of positional adjustment in vertical directions to the hands 18-21.SELECTED DRAWING: Figure 5
Inventors:
Tamotsu Kuribayashi
Application Number:
JP2017060733A
Publication Date:
April 21, 2021
Filing Date:
March 27, 2017
Export Citation:
Assignee:
Nidec Sankyo Co., Ltd.
International Classes:
B25J15/00; B25J15/08; H01L21/677
Domestic Patent References:
| JP2005116807A | ||||
| JP2010179419A | ||||
| JP2010179420A | ||||
| JP51152781U |
Attorney, Agent or Firm:
Shin Kodaira
Toru Kawai
Kawaguchi Nobuko
Toru Kawai
Kawaguchi Nobuko