Title:
検査用熱処理炉を備えた検査装置
Document Type and Number:
Japanese Patent JP6868163
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treatment furnace for an inspection that can uniformly heat each part of a sample surface by heated wind to uniformly increase the temperature.SOLUTION: A heat treatment wind E2 supplied to a heat treatment chamber 2 from a blowout port 6 and a heat treatment wind E3 substantially as a laminar flow slower than the heat treatment wind E2 flow in one direction alone in which the winds flow from the blowout port 6 side as a windward to a sample W side as a leeward and are discharged from an exit port 14. Also, the flow of the heat treatment wind E3 in the position of the sample W is a gentle flow to the downstream or is substantially a gentle laminar flow.SELECTED DRAWING: Figure 3
Inventors:
Makoto Haneda
Susumu Nakatani
Susumu Nakatani
Application Number:
JP2017211428A
Publication Date:
May 12, 2021
Filing Date:
November 01, 2017
Export Citation:
Assignee:
Susumu Nakatani
Makoto Haneda
Makoto Haneda
International Classes:
G01N23/04
Domestic Patent References:
| JP2009123858A | ||||
| JP2011095252A | ||||
| JP2010261835A | ||||
| JP2009074724A | ||||
| JP2005071632A | ||||
| JP2014095640A | ||||
| JP2017032285A | ||||
| JP2017516114A |
Foreign References:
| US20150276943 |