Title:
真空用軸受の振動測定装置
Document Type and Number:
Japanese Patent JP6881133
Kind Code:
B2
Abstract:
To provide a vibration measuring device of a bearing for a vacuum that can detect a vibration of a bearing for vacuum which operates in a vacuum environment, by an acceleration sensor set under a normal pressure.SOLUTION: The present invention includes a vibrator 32, which can be displaced in the direction of vibration of a bearing 1 for vacuum set in a vacuum chamber VR; a vibration unit 30, which can penetrate the top plate 11 of the vacuum chamber VR; rings 39, 40, and 43 between the top plate 11 and the vibration unit 30 for sealing the vacuum chamber VR; and a vibration acceleration pick-up 48 in the vacuum chamber VR, which detects the vibration of the vibrator 32.SELECTED DRAWING: Figure 1
Inventors:
Masayuki Hosoya
Application Number:
JP2017147980A
Publication Date:
June 02, 2021
Filing Date:
July 31, 2017
Export Citation:
Assignee:
Nippon Seiko Co., Ltd.
International Classes:
G01M13/04
Domestic Patent References:
| JP59098327U | ||||
| JP2006258473A | ||||
| JP2010066062A | ||||
| JP2009031100A | ||||
| JP2003113850A |
Foreign References:
| US20060288787 |
Attorney, Agent or Firm:
Patent business corporation glory patent office