Title:
２次元光走査ミラー装置の製造方法
Document Type and Number:
Japanese Patent JP6884322
Kind Code:
B2
Abstract:
A two-dimensional optical scanning mirror device, a manufacturing method for the same, a two-dimensional optical scanning device and an image projector. A two-dimensional optical scanning mirror device includes a substrate, a movable mirror portion supported on the substrate in such a manner that two-dimension optical scanning is possible, a hard magnetic thin film provided in the movable mirror portion and a magnetic field generator that includes at least an alternating magnetic field generator for driving the movable mirror portion, where the hard magnetic thin film has a magnetization direction in a direction of a film plane, and the ratio of the magnetic field generated by the magnetic field generator relative to the coercive force of the hard magnetic thin film is 0.2 or lower.
Inventors:
Toshio Katsuyama
Ishigami Tatsuya
Ishigami Tatsuya
Application Number:
JP2016212976A
Publication Date:
June 09, 2021
Filing Date:
October 31, 2016
Export Citation:
Assignee:
National University Corporation Fukui University
Wakasa Bay Energy Research Center
Wakasa Bay Energy Research Center
International Classes:
G02B26/10; B81B3/00; B81C1/00; G02B26/08
Domestic Patent References:
| JP2005169553A | ||||
| JP2005084571A | ||||
| JP2005181576A | ||||
| JP2004297923A | ||||
| JP6082711A | ||||
| JP2004102267A | ||||
| JP2014130287A | ||||
| JP2014016387A | ||||
| JP2013045990A |
Foreign References:
| US20060119925 | ||||
| WO2015198523A1 |
Attorney, Agent or Firm:
Kenji Doi
Hayashi Tsunetoku
Manabe Kiyoshi
Hayashi Tsunetoku
Manabe Kiyoshi