Title:
研磨装置
Document Type and Number:
Japanese Patent JP6893023
Kind Code:
B2
Abstract:
The present invention provides a polishing apparatus which can preferentially and efficiently adjust a temperature of a predetermined region which is a main temperature adjustment target of a polishing surface without complication of the structure, and can suppress a local change in temperature of the polishing surface accompanying polishing of the workpiece. Or, a grinding device that is locallyoffset from the grinding conditions associated therewith. The temperature adjustment structure (40) provided on the back side of the polishing surface of the lower fixed plate (2) has a water supply port (41) for supplying a temperature adjustment fluid, a water discharge port (42) for discharging a temperature adjustment fluid, and a flow path (43), extending along a plurality of concentric circles arranged in the radial direction of the lower fixed plate (2); a partition wall (44) extending in the radial direction of the lower fixed plate (2) and separating the concentric circles. Further, the temperature adjustment fluid flows from the water supply port (41) in the third flow path (43c) along the third concentric circle (R3) toward the first direction, and is folded back along the partition wall (44) to flow in the fourth direction. The fourth flow path (43d) of the concentric circle (R4) flows in the opposite direction to the first direction along the fourth flow path (43d), and isdischarged from the drain port (42).
Inventors:
Yu Tayama
Masaki Sugiyama
Takayuki Oyama
Takashi Tanaka
Akihiko Yamatani
Taketoshi Kato
Masaki Sugiyama
Takayuki Oyama
Takashi Tanaka
Akihiko Yamatani
Taketoshi Kato
Application Number:
JP2017113551A
Publication Date:
June 23, 2021
Filing Date:
June 08, 2017
Export Citation:
Assignee:
Speed Fam Co., Ltd.
International Classes:
B24B37/08; B24B49/08; B24B49/14; B24B55/02; H01L21/304
Domestic Patent References:
| JP10296619A | ||||
| JP2001018169A | ||||
| JP1159171A | ||||
| JP5177531A |
Foreign References:
| US4974370 | ||||
| CN203831226U |
Attorney, Agent or Firm:
Cleo International Law & Patent Office