Title:
プラズマ照射装置
Document Type and Number:
Japanese Patent JP6916393
Kind Code:
B2
Abstract:
A plasma application apparatus including: an application instrument which has a plasma generation unit, and is configured to discharge at least one of plasma generated by the plasma generation unit and a reactive gas generated by the plasma; and a supply unit for supplying electric power and a plasma generating gas to the application instrument, a supporting part extending upward from the supply unit, a power/gas supply line connecting the application instrument to the supply unit, and a connecting part connecting at least one of the application instrument and the power/gas supply line to the supporting part,
Inventors:
High Masahiro Ta
Tsuyoshi Uehara
Akiko Togi
Takaya Oshita
Motoharu Ataka
Mayu Tada
Yuu Nagahara
Inoue Kowashi
Tsuyoshi Uehara
Akiko Togi
Takaya Oshita
Motoharu Ataka
Mayu Tada
Yuu Nagahara
Inoue Kowashi
Application Number:
JP2020527699A
Publication Date:
August 11, 2021
Filing Date:
June 28, 2019
Export Citation:
Assignee:
Sekisui Chemical Co.,Ltd.
International Classes:
A61N1/44; A61C19/06; H05H1/26
Domestic Patent References:
| JP62059007U | ||||
| JP2006254986A | ||||
| JP2013128681A | ||||
| JP7299104A |
Foreign References:
| US20170339776 |
Attorney, Agent or Firm:
Nishizawa Kazumi
Yuichiro Kawagoe
Makiko Otsuki
Hiroshi Yamaguchi
Yuichiro Kawagoe
Makiko Otsuki
Hiroshi Yamaguchi