Title:
フォーカスリング及び半導体製造装置
Document Type and Number:
Japanese Patent JP6932070
Kind Code:
B2
Abstract:
A part for a semiconductor manufacturing apparatus, the part being enabled to cause electricity to pass through and including an insulating member.
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Inventors:
Naoki Sugawa
Naoyuki Sato
Kazuya Nagaseki
Naoyuki Sato
Kazuya Nagaseki
Application Number:
JP2017229015A
Publication Date:
September 08, 2021
Filing Date:
November 29, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065
Domestic Patent References:
| JP2013168690A | ||||
| JP2011108764A | ||||
| JP2011124377A | ||||
| JP2013125823A | ||||
| JP2005260011A | ||||
| JP2006270019A | ||||
| JP2010028073A | ||||
| JP2013149935A | ||||
| JP2012232897A | ||||
| JP2002016126A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito