Title:
オリゴシランの製造方法及びオリゴシランの製造装置
Document Type and Number:
Japanese Patent JP6938528
Kind Code:
B2
Abstract:
Provided is an oligosilane production method with which a target oligosilane can be selectively produced. A reaction-produced mixture fluid which contains an oligosilane obtained by the dehydrogenative coupling of a hydrosilane is supplied to a membrane separator under specific conditions and/or brought into contact with an adsorbent under specific conditions.
Inventors:
Kimura Umura
Hiroyuki Uchida
Hiroyuki Uchida
Application Number:
JP2018547650A
Publication Date:
September 22, 2021
Filing Date:
October 23, 2017
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
C01B33/04; B01D53/04; B01D53/22; B01D69/00; B01D71/02
Domestic Patent References:
| JP2013520389A | ||||
| JP2012507455A | ||||
| JP2014529560A | ||||
| JP11260729A |
Foreign References:
| WO2016027743A1 | ||||
| WO2015060189A1 |
Attorney, Agent or Firm:
Hidewa Patent Office