Title:
ＥＵＶ放射を反射する多層膜ミラーおよびその製造方法
Document Type and Number:
Japanese Patent JP6938626
Kind Code:
B2
Abstract:
A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.
Inventors:
Philip Nouyoku
Sergie Yulin
Norbert Kaiser
Sergie Yulin
Norbert Kaiser
Application Number:
JP2019518427A
Publication Date:
September 22, 2021
Filing Date:
September 25, 2017
Export Citation:
Assignee:
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
International Classes:
G02B5/08; C23C14/06; G03F7/20; H01L21/30
Domestic Patent References:
| JP2014523641A | ||||
| JP2011527416A |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Morita Taku
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima
Morita Taku
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima