Title:
センサ、マイクロフォン、血圧センサ及びタッチパネル
Document Type and Number:
Japanese Patent JP6941085
Kind Code:
B2
Abstract:
A sensor includes a structure body including a deforming portion, and a first sensing element provided at the deforming portion. The first sensing element includes first to fourth magnetic layers and a first intermediate layer. The first magnetic layer is provided between the second and third magnetic layers. The fourth magnetic layer is provided between the first and third magnetic layers. The first intermediate layer is provided between the second and first magnetic layers. The third magnetic layer includes at least one of a first material or a second material. The first material includes at least one selected from the group consisting of Ir—Mn, Pt—Mn, Pd—Pt—Mn, and Ru—Rh—Mn. The second material includes at least one of CoPt, (CoxPt100-x)100-yCry, or FePt. A crystallinity of at least a portion of the fourth magnetic layer is higher than a crystallinity of the first magnetic layer.
Inventors:
Kazuaki Okamoto
Yoshihiko Fuji
Yoshihiro Higashi
Shotaro Baba
Michiko Hara
Yoshihiko Fuji
Yoshihiro Higashi
Shotaro Baba
Michiko Hara
Application Number:
JP2018160335A
Publication Date:
September 29, 2021
Filing Date:
August 29, 2018
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L43/08; G01L9/16; H01F10/14; H01F10/30; H01L43/02; H01L43/10
Domestic Patent References:
| JP2015061070A | ||||
| JP11233344A | ||||
| JP2017045978A | ||||
| JP2017040509A |
Attorney, Agent or Firm:
Masahiko Hinataji