Title:
二重フィルムを有するフィルムチャンバ
Document Type and Number:
Japanese Patent JP6944527
Kind Code:
B2
Abstract:
The invention relates to a film chamber 10 which has a film chamber wall for testing the sealing tightness of a gas-filled test specimen 38, which film chamber wall defines a chamber volume 32 for holding the test specimen 38 and has a first vacuum connection 28 for evacuating the chamber volume 32 by means of a first vacuum pump 30 connected to the first vacuum connection 28, wherein at least a portion of the film chamber wall has a flexible film 12, 14, characterized in that the film 12, 14 has two layers 20, 22 arranged adjacent to each other which surround an evacuable film interspace 26.
Inventors:
Wetzich Daniel
Application Number:
JP2019539832A
Publication Date:
October 06, 2021
Filing Date:
January 17, 2018
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01M3/32
Domestic Patent References:
| JP1291139A | ||||
| JP2014533825A |
Foreign References:
| EP0741288A1 | ||||
| WO2015140042A1 |
Attorney, Agent or Firm:
Shuji Sugimoto
Kenro Tsutsumi
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Hiroki Taniguchi
Kenro Tsutsumi
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Hiroki Taniguchi