Title:
バルク波共振子および帯域通過フィルタ
Document Type and Number:
Japanese Patent JP6947867
Kind Code:
B2
Abstract:
[PROBLEM TO BE SOLVED] To provide a bulk wave resonator having a high frequency passband.[SOLUTION] A bulk wave resonator using a bulk wave, includes a support substrate, an acoustic multilayer film that includes, stacked on the support substrate, a plurality of types of dielectrics having different acoustic impedances, a piezoelectric layer that is stacked on the acoustic multilayer film, a first electrode, and a second electrode. The first and second electrodes are disposed to face each other with a gap therebetween on a first surface of the piezoelectric layer opposite to the acoustic multilayer film, and are applied with a voltage for allowing the piezoelectric layer to generate the bulk wave. A direction that is parallel to the surface of the piezoelectric layer and in which the first electrode and the second electrode face each other is defined as a first direction. The bulk wave resonator uses, as a main mode, a bulk wave in the first direction that is generated by a thickness shear vibration in the first direction, which is excited by a parallel electric field formed in the piezoelectric layer when a voltage applied to the first electrode and the second electrode.
Inventors:
Hiroshi Hasegawa
Tadashi Iwata
Takumi Ozaki
Nakamura Ira
Tadashi Iwata
Takumi Ozaki
Nakamura Ira
Application Number:
JP2020053005A
Publication Date:
October 13, 2021
Filing Date:
March 24, 2020
Export Citation:
Assignee:
Dexerials Co., Ltd.
International Classes:
H03H9/17; H03H9/54
Domestic Patent References:
| JP9199980A | ||||
| JP2010136317A | ||||
| JP2013528996A | ||||
| JP2015502065A | ||||
| JP2010161671A | ||||
| JP2013123184A | ||||
| JP2001077657A | ||||
| JP2001339272A | ||||
| JP2007028594A | ||||
| JP2007507960A | ||||
| JP2008502240A |
Foreign References:
| WO2010007805A1 |
Attorney, Agent or Firm:
Aomi patent office