Title:
研磨布
Document Type and Number:
Japanese Patent JP6951895
Kind Code:
B2
Abstract:
The present invention is a polishing cloth provided with, as forming materials: a nonwoven fabric; and a resin impregnating the nonwoven fabric, wherein the existence rate of the forming materials in an area from the center portion in the thickness direction to one surface is 30-60%, and the difference between the maximum value and the minimum value of the existence rate in the thickness direction is 10% or lower.
Inventors:
Keiji Yamamoto
Takashi Takeda
Eito Ito
Takashi Takeda
Eito Ito
Application Number:
JP2017143436A
Publication Date:
October 20, 2021
Filing Date:
July 25, 2017
Export Citation:
Assignee:
Nitta DuPont Co., Ltd.
International Classes:
B24B37/24; D06M15/564; H01L21/304
Domestic Patent References:
| JP62140769A | ||||
| JP2011009584A | ||||
| JP2008207323A | ||||
| JP2014139361A |
Foreign References:
| WO2014125797A1 | ||||
| WO2010016486A1 |
Attorney, Agent or Firm:
Noboru Fujimoto
Hiroaki Nakatani
Hiroaki Nakatani