Title:
レプリカモールドの製造方法及びインプリント装置
Document Type and Number:
Japanese Patent JP6954436
Kind Code:
B2
Abstract:
To provide a replica mold manufacturing method and an imprinting device having a fine uneven pattern with excellent position accuracy.SOLUTION: A method of manufacturing a replica mold using a master mold in which a fine uneven pattern is formed on a first surface side, and a recess is formed on a second surface side includes steps of convexly curving the first surface side by adjusting the pressure in a recessed portion of a replica molding substrate, and convexly curving the first surface side by adjusting the pressure in a recessed portion of the master mold to bring the first surface sides into contact with each other, adjusting the pressure in the recess portions of the replica molding substrate and the master mold to transfer the fine uneven pattern to a material to be transferred, and separating the material to be transferred to which the fine uneven pattern has been transferred from the master mold, and the pressure in the recess portion is adjusted such that the first surface of the convexly curved replica molding substrate and the first surface of the convexly curved master mold return to a flat surface within a predetermined range at the same time.SELECTED DRAWING: Figure 1
Inventors:
Saburo Harada
Koji Yoshida
Ryuji Nagai
Koji Ichimura
Koji Yoshida
Ryuji Nagai
Koji Ichimura
Application Number:
JP2020178306A
Publication Date:
October 27, 2021
Filing Date:
October 23, 2020
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C33/38; B29C59/02
Domestic Patent References:
| JP2012532448A | ||||
| JP2015159217A | ||||
| JP2016009797A | ||||
| JP2014007361A | ||||
| JP2015029032A | ||||
| JP2010221374A | ||||
| JP2016096327A | ||||
| JP2014086668A | ||||
| JP2016009750A | ||||
| JP2009518207A | ||||
| JP2011512019A |
Attorney, Agent or Firm:
Masataka Ota