Title:
気体供給装置
Document Type and Number:
Japanese Patent JP6955260
Kind Code:
B2
Abstract:
A gas feed device (60) is provided with a material container (Zn), a dilution container (Xn), and a valve part (Yn). The material container (Zn) houses a material gas (Gn). The dilution container (Xn) mixes the material gas (Gn) introduced from the material container (Zn) with a carrier gas (CG) for diluting the material gas (Gn), and houses the mixed gas as a diluted material gas (Dn). The valve part (Yn) introduces the material gas (Gn) and the carrier gas (CG) into the dilution container (Xn) at mutually different timings. After the material gas (Gn) is mixed with the carrier gas (CG), the valve part (Yn) discharges the diluted material gas (Dn) from the dilution container (Xn).
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Inventors:
Kikuro Takemoto
Toshikazu Ishikawa
Hiroshi Mihira
Toshikazu Ishikawa
Hiroshi Mihira
Application Number:
JP2017253464A
Publication Date:
October 27, 2021
Filing Date:
December 28, 2017
Export Citation:
Assignee:
AC E Co., Ltd.
International Classes:
C23C16/448; H01L21/205; H01L21/31
Domestic Patent References:
| JP2014007378A | ||||
| JP2006041481A | ||||
| JP2004323894A | ||||
| JP2002252219A | ||||
| JP2002043282A | ||||
| JP2005327995A | ||||
| JP2005347446A | ||||
| JP2001093895A | ||||
| JP2009125703A | ||||
| JP2005248231A |
Attorney, Agent or Firm:
Hiroyuki Maei