Title:
静電チャックおよび基板保持方法
Document Type and Number:
Japanese Patent JP7190802
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrostatic chuck having a compact configuration and capable of keeping adsorption power to a wafer even when disconnected from a power supply, and the like.SOLUTION: An electrostatic chuck comprises: a ceramic base body including a substrate mounting surface on which a substrate is mounted; a first electrode structure provided in the ceramic base body and including at least one first electrode extending in a direction along the substrate mounting surface and at least one first power feeding portion electrically connected to the first electrode and exposed from the ceramic base body; and a second electrode structure provided in the ceramic base body and including at least one second electrode facing the first electrode and at least one second power feeding portion electrically connected to the second electrode and exposed from the ceramic base body.SELECTED DRAWING: Figure 1
Inventors:
Toshiya Umeki
Atsushi Tsuchida
Noriaki Tokumasa
Tetsuo Kitabayashi
Atsushi Tsuchida
Noriaki Tokumasa
Tetsuo Kitabayashi
Application Number:
JP2017027333A
Publication Date:
December 16, 2022
Filing Date:
February 16, 2017
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2000021961A | ||||
| JP9162272A |
Attorney, Agent or Firm:
Creation International Patent Office