Title:
軟Ｘ線光源
Document Type and Number:
Japanese Patent JP7193182
Kind Code:
B2
Abstract:
Disclosed is a soft X-ray light source, which comprises a vacuum target chamber, a refrigeration cavity (44), and a nozzle (36). The refrigeration cavity (44) and the nozzle (36) are contained in the vacuum target chamber. The nozzle (36) is arranged in the refrigeration cavity. The vacuum target chamber comprises a t-branch tube (40) and a multi-channel tube (50). The t-branch tube (40) has a first outlet and a second outlet opposed to each other as well as a third outlet, wherein the first outlet is connected to a mounting plate (10) through which a refrigerant inlet pipe (13), a refrigerant outlet pipe (12), and a working gas pipe (11) respectively pass and are connected to the refrigeration cavity (44) and wherein the third outlet is connected to a vacuum extraction device. The multi-channel tube (50) comprises a top opening and a bottom opening opposed to each other, wherein the top opening is tightly connected to the second outlet, wherein a vacuum outlet is provided at the bottom opening, wherein the nozzle (36) has a position corresponding to those of side openings, wherein provided under the nozzle (36) is a groove which is fixed by a metal adapter (513) arranged at the vacuum outlet, and wherein the groove is in communication with the vacuum outlet. In the present application, the refrigeration cavity (44) is kept with a high refrigeration performance and the stability of the micro-liquid flow is also maintained, such that the performance of soft X-rays is improved.
Inventors:
Ryu Way
Zen Louis
Sheching O
Xiao Pen
Zen Louis
Sheching O
Xiao Pen
Application Number:
JP2021536731A
Publication Date:
December 20, 2022
Filing Date:
October 29, 2019
Export Citation:
Assignee:
RAYCAN TECHNOLOGY CO., LTD. (SUZHOU)
International Classes:
H01J35/12; H01J35/00; H05G2/00
Domestic Patent References:
| JP2000091095A | ||||
| JP2003337200A | ||||
| JP2006156577A | ||||
| JP2007064973A |
Foreign References:
| US5459771 | ||||
| US20070053487 | ||||
| CN101111119A | ||||
| CN1728915A | ||||
| CN203775509U | ||||
| KR100651055B1 |
Attorney, Agent or Firm:
Hiroki Masaki
Teppei Hirota
Yusaku Tokai
Horiuchi Makoto
Masako Yamauchi
Shuichi Sonomoto
Maki Shinoda
Jin Watanabe
Teppei Hirota
Yusaku Tokai
Horiuchi Makoto
Masako Yamauchi
Shuichi Sonomoto
Maki Shinoda
Jin Watanabe