Title:
放射ビームのための反射光学素子
Document Type and Number:
Japanese Patent JP7324768
Kind Code:
B2
Abstract:
A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.
Inventors:
Hofstra, Ramon, Mark
Tifkov, Andrey, Sergeevich
Denuville, Francois, Charles, Dominique
Swinkels, Geralds, Hubertus, Petras, Maria
Luis, Petrus, Adrianus, Theodorus, Maria
Tifkov, Andrey, Sergeevich
Denuville, Francois, Charles, Dominique
Swinkels, Geralds, Hubertus, Petras, Maria
Luis, Petrus, Adrianus, Theodorus, Maria
Application Number:
JP2020554290A
Publication Date:
August 10, 2023
Filing Date:
April 10, 2019
Export Citation:
Assignee:
ASM L Netherlands B.V.
International Classes:
G03F7/20; G02B5/00; G02B5/08
Domestic Patent References:
| JP2013516644A | ||||
| JP2005004145A | ||||
| JP2017538962A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito