Title:
研磨パッド及びその製造方法、並びに研磨加工品の製造方法
Document Type and Number:
Japanese Patent JP7328838
Kind Code:
B2
Abstract:
To provide a polishing pad for notch-polishing excellent in abrasion resistance, a manufacturing method for the same, and a manufacturing method for a polishing-processed product using the polishing pad.SOLUTION: A polishing pad in a circular shape or in a circular ring-shape, formed of resin-impregnated non-woven fabric including non-woven fabric and resin impregnated in the non-woven fabric, comprises at an outer periphery thereof a polishing part for polishing a notch part formed at an outer peripheral edge part of a work-piece. On a cross section appearing of the polishing pad after cutting the pad in a thickness direction, a ratio of fiber blended so that the fiber is within ±30° angles with respect to a direction horizontal to a surface of the polishing pad is 50% or more.SELECTED DRAWING: Figure 1
Inventors:
Futoshi Kashiwada
Shin Tokushige
Masataka Takagi
Shin Tokushige
Masataka Takagi
Application Number:
JP2019164243A
Publication Date:
August 17, 2023
Filing Date:
September 10, 2019
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/11; B24B9/00; B24B31/00; H01L21/304
Domestic Patent References:
| JP2010050277A | ||||
| JP2010108968A | ||||
| JP2010157619A | ||||
| JP2004087647A | ||||
| JP10308369A | ||||
| JP2010162636A | ||||
| JP2011005606A | ||||
| JP2018148212A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito