Title:
セラミックス、プローブ案内部品、プローブカードおよびパッケージ検査用ソケット
Document Type and Number:
Japanese Patent JP7373651
Kind Code:
B2
Abstract:
A ceramic containing, in mass %:Si3N4: 20.0 to 60.0%,ZrO2: 25.0 to 70.0%,at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less,at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency. Fn=SiC+3AlN/Si3N4+ZrO2
Inventors:
Ko Yamagishi
Kazumasa Mori
Shunichi Etoh
Kazumasa Mori
Shunichi Etoh
Application Number:
JP2022514122A
Publication Date:
November 02, 2023
Filing Date:
April 08, 2021
Export Citation:
Assignee:
Ferrotec Material Technologies Co., Ltd.
International Classes:
C04B35/488; C04B35/596; G01R1/073
Domestic Patent References:
| JP64033072A | ||||
| JP2010180105A | ||||
| JP64005975A | ||||
| JP61068374A | ||||
| JP2005119941A |
Foreign References:
| WO2019078364A1 | ||||
| WO2019093370A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Britus