Title:
フォトニックチップ及びその製造方法
Document Type and Number:
Japanese Patent JP7417320
Kind Code:
B2
Abstract:
A photonic chip and a preparation method thereof are provided. The chip includes a lithium niobate film modulator array (1), a first optical coupling array (2), and a silica waveguide wavelength-division multiplexer (3), and the lithium niobate film modulator array (1) includes one or more lithium niobate film modulators and is used to modulate an optical signal; the first optical coupling array (2) includes one or more first optical coupling structures, and the first optical coupling structure has one end connected to a corresponding lithium niobate thin film modulator and the other end connected to the silica waveguide wavelength-division multiplexer (3) so as to transmit the modulated optical signal to the silica waveguide wavelength-division multiplexer (3); and the silica waveguide wavelength-division multiplexer (3) is used to perform wavelength-division multiplexing on the modulated optical signal. A monolithic integration of an on-chip lithium niobate thin film modulator and an on-chip wavelength-division multiplexing structure may be achieved, and a device integration level may be improved.
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Inventors:
Yang Lin
Yang Xiangling
Chan Ray
Yang Xiangling
Chan Ray
Application Number:
JP2022503400A
Publication Date:
January 18, 2024
Filing Date:
July 17, 2019
Export Citation:
Assignee:
中国科学院半▲導▼体研究所
International Classes:
G02F1/035; G02B6/122; G02B6/125; G02B6/13
Domestic Patent References:
| JP2002116419A | ||||
| JP2010512543A |
Foreign References:
| CN108732795A | ||||
| US20110096925 | ||||
| CN109407208A | ||||
| US20090324163 |
Other References:
He et al.,High-Performance Hybrid Silicon and Lithium Niobate Mach-Zehnder Modulators for 100 Gbit/s and Beyond,[online],[令和4年1月25日検索],arXiv,2018年11月02日,インターネット
Yamazaki et al.,“Advanced optical modulators with hybrid configuration of silica-based PLC and LiNbO3 phase-shifter array for ultra-high-speed transport networks”,2008 First ITU-T Kaleidoscope Academic Conference - Innovations in NGN: Future Network and Services,2008年05月12日,p.237-244,DOI: 10.1109/KINGN.2008.4542271
Yamazaki et al.,“Advanced optical modulators with hybrid configuration of silica-based PLC and LiNbO3 phase-shifter array for ultra-high-speed transport networks”,2008 First ITU-T Kaleidoscope Academic Conference - Innovations in NGN: Future Network and Services,2008年05月12日,p.237-244,DOI: 10.1109/KINGN.2008.4542271
Attorney, Agent or Firm:
Hideto Manno