Title:
貯蔵環境検出手段を備えた基板貯蔵装置
Document Type and Number:
Japanese Patent JP7417565
Kind Code:
B2
Abstract:
The invention discloses a reticle pod for receiving a reticle. The reticle pod includes a base and plural support device provided on the base for supporting the reticle. A first distance is defined between a peripheral area of a bottom surface of the reticle and an upward facing top surface of the base. A second distance is defined between a central area of the bottom surface of the base and the upward facing top surface of the base, wherein the central area is encircled by the peripheral area. The second distance is larger than the first distance.
Inventors:
Qiu Inui
Soyawa
Xue Shinmin
Hayashi Rhyme
Soyawa
Xue Shinmin
Hayashi Rhyme
Application Number:
JP2021159777A
Publication Date:
January 18, 2024
Filing Date:
September 29, 2021
Export Citation:
Assignee:
GUDENG PRECISION INDUSTRIAL CO.,LTD
International Classes:
H01L21/673; G01N27/00
Domestic Patent References:
| JP2004047929A | ||||
| JP2020021778A | ||||
| JP2019176024A | ||||
| JP2011186006A |
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Hiroyuki Suda
Ichiro Kurasawa
Yasushi Yamamoto
Hiroko Suzuki
Makoto Watanabe
▲吉▼田 和彦
Hiroyuki Suda
Ichiro Kurasawa
Yasushi Yamamoto
Hiroko Suzuki
Makoto Watanabe