Title:
制御器及び気化供給装置
Document Type and Number:
Japanese Patent JP7461686
Kind Code:
B2
Abstract:
[Problem] To provide a controller for controlling fluid which can improve the loss resistance of a synthetic resin coating of a diaphragm and a vaporization supply device provided with the controller. [Solution] A controller (3) comprising: a body (8) provided with an inflow passage (6) and an outflow passage (7); a valve seat (9) provided between the inflow passage (6) and the outflow passage (7); a diaphragm (10) capable of being seated on or unseated from the valve seat (9); and an actuator (11) that causes the diaphragm (10) to be seated on or unseated from the valve seat (9), wherein the material of the valve seat (9) is nickel-based and the diaphragm (10) is provided with a synthetic resin coating (27) on a surface thereof to be brought into abutment with the valve seat (9).
Inventors:
Atsushi Hidaka
Kazuki Tanaka
Takanori Nakatani
Kazuyuki Morisaki
Masafumi Kitano
Kaoru Hirata
Masaaki Nagase
Koji Nishino
Shinichi Ikeda
Kazuki Tanaka
Takanori Nakatani
Kazuyuki Morisaki
Masafumi Kitano
Kaoru Hirata
Masaaki Nagase
Koji Nishino
Shinichi Ikeda
Application Number:
JP2023510759A
Publication Date:
April 04, 2024
Filing Date:
March 08, 2022
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
F16K7/12; F16K7/17
Domestic Patent References:
| JP201825293A | ||||
| JP202045917A | ||||
| JP2004263576A |
Attorney, Agent or Firm:
Ryuichi Yata
Kenichi Yoshitake
Kenichi Yoshitake