Title:
プローブ操作装置
Document Type and Number:
Japanese Patent JP7470796
Kind Code:
B2
Abstract:
A probe operation device according to the present invention comprises: a base; a probe drive unit which drives, in at least the vertical direction, a probe that is for inspection or work; and a height adjustment unit which adjusts the height of the probe drive unit relative to the base.
Inventors:
Shigeyoshi Inagaki
Naofumi Yoshida
Masataka Yumura
Naofumi Yoshida
Masataka Yumura
Application Number:
JP2022541079A
Publication Date:
April 18, 2024
Filing Date:
August 07, 2020
Export Citation:
Assignee:
Fuji corporation
International Classes:
A61B8/00
Domestic Patent References:
| JP2015148613A | ||||
| JP2010217182A | ||||
| JP2007024895A | ||||
| JP2006025960A | ||||
| JP55059606U |
Attorney, Agent or Firm:
Patent Attorney Corporation Kyoritsu Patent Office