Title:
感活性光線性又は感放射線性樹脂組成物の製造方法、パターン形成方法、及び電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP7470803
Kind Code:
B2
Abstract:
A method for producing an actinic ray-sensitive or radiation-sensitive resin composition having a viscosity of 10 mPa·s or more, the method containing a step 1 of charging at least a resin of which polarity increases by an action of an acid, a photoacid generator, and a solvent as raw materials into a stirring tank, and a step 2 of stirring the raw materials in the stirring tank. A liquid temperature in the stirring tank is controlled to be equal to or lower than a 3.0° C. higher temperature than a liquid temperature at a start of the step 2 throughout the entire step 2, and the control of the liquid temperature in the stirring tank in the step 2 is performed by passing an inert gas through the stirring tank.
Inventors:
Keimitsu Tomiga
Takumi Tanaka
Fumihiro Yoshino
Yuma Kurumisawa
Takumi Tanaka
Fumihiro Yoshino
Yuma Kurumisawa
Application Number:
JP2022545746A
Publication Date:
April 18, 2024
Filing Date:
August 27, 2021
Export Citation:
Assignee:
Fujifilm Corporation
International Classes:
G03F7/039; C08F212/14; G03F7/20
Domestic Patent References:
| JP2013136560A | ||||
| JP62117323A | ||||
| JP2013151627A |
Foreign References:
| WO2018037812A1 | ||||
| WO2013118680A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Koei Office