Title:
欠陥検査装置
Document Type and Number:
Japanese Patent JP7476057
Kind Code:
B2
Abstract:
A defect inspection device includes an ultrasonic probe, an image acquirer, a calculator, and a corrector. The ultrasonic probe acquires an ultrasonic image of an inspection object or a simulated inspection object. The image acquirer acquires an infrared image including a first region of the simulated inspection object or a second region of the inspection object. The calculator calculates a first correction value for correcting a coordinate deviation of the first region in the ultrasonic image and the infrared image with respect to a designed coordinate of the first region, or calculate a second correction value for correcting a coordinate deviation of the second region in the infrared image with respect to a designed coordinate of the second region. The corrector performs coordinate correction with the calculated first or second correction value for the ultrasonic image of the inspection object.
Inventors:
Hiroshi Tamura
Application Number:
JP2020153258A
Publication Date:
April 30, 2024
Filing Date:
September 11, 2020
Export Citation:
Assignee:
Kioxia Corporation
International Classes:
G01N29/06; G01N21/88
Domestic Patent References:
| JP2009222408A | ||||
| JP2012185140A | ||||
| JP7301623A | ||||
| JP2012042431A | ||||
| JP10229108A | ||||
| JP2007258555A | ||||
| JP2015166751A | ||||
| JP2005345233A | ||||
| JP2017129560A | ||||
| JP2018105844A |
Foreign References:
| CN110827256A | ||||
| CN107037083A |
Attorney, Agent or Firm:
Yukitaka Nakamura
Satoru Asakura
Takeshi Sekine
Akira Akaoka
Takeyuki Suzuki
Satoru Asakura
Takeshi Sekine
Akira Akaoka
Takeyuki Suzuki