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Document Type and Number:
Japanese Patent JPH01104050
Kind Code:
U
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Application Number:
JP19764387U
Publication Date:
July 13, 1989
Filing Date:
December 28, 1987
Export Citation:
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International Classes:
H01L29/78; H01L21/8238; H01L27/08; H01L27/088; H01L27/092; H02H7/20; H02H11/00; (IPC1-7): H01L29/78; H01L27/08; H01L29/78; H02H7/20; H02H11/00



 
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