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Patent Searching and Data


Document Type and Number:
Japanese Patent JPH01143119
Kind Code:
U
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Application Number:
JP3764588U
Publication Date:
October 02, 1989
Filing Date:
March 24, 1988
Export Citation:
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International Classes:
H01L21/22; F27D5/00; (IPC1-7): H01L21/22; F27D5/00; H01L21/22



 
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