Login| Sign Up| Help| Contact|

Patent Searching and Data


Document Type and Number:
Japanese Patent JPH0122234
Kind Code:
B2
More Like This:
JPH09312357SEMICONDUCTOR DEVICE
JPWO2020004564Manufacturing method of semiconductor manufacturing equipment members and semiconductor manufacturing equipment members
Inventors:
NAKAMURA KYOSHI
INOE KOICHI
KAWASAKI SHOZO
YASUDA KAZUYUKI
Application Number:
JP20847082A
Publication Date:
April 25, 1989
Filing Date:
November 30, 1982
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C04B37/02; F16H53/02



 
Next Patent: JPH0122235