Document Type and Number:
Japanese Patent JPH0125253
Kind Code:
Y2
Application Number:
JP10996483U
Publication Date:
July 28, 1989
Filing Date:
July 14, 1983
Export Citation:
International Classes:
F28D20/00; F25B1/00; F25B9/00; F25B9/14; F28D17/02; H01L39/04; (IPC1-7): F25B9/00
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